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and Korean
This Document also provides a guide for grades of trimethylborate for which an industry need has been identified
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1 The purpose of this Standard is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications
previously published November 2008
C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdPbc-0421 and KoreanNOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical